Methods for fabricating magnetic writer structures using post-deposition tilting

ABSTRACT

A method according to one embodiment includes forming a first portion of a thin film writer structure on a substantially planar portion of a substrate such that planes of deposition of the first portion of the writer structure are substantially parallel to a plane of the substrate; forming a portion of a write gap of the writer structure at an angle of greater than 0° relative to the substantially planar portion of the substrate; and causing the writer structure to tilt at an angle relative to the plane of the substrate such that a plane of deposition of the write gap is oriented about perpendicular to a final media-facing surface of the writer structure.

RELATED APPLICATIONS

This application is a divisional of copending U.S. patent applicationSer. No. 12/547,246, filed Oct. 25, 2009; which is herein incorporatedby reference.

BACKGROUND

The present invention relates to thin film processing, and moreparticularly, this invention relates to methods for fabricating magneticwriter structures using post-deposition tilting.

In magnetic storage systems, data is read from and written onto magneticrecording media utilizing magnetic transducers commonly. Data is writtenon the magnetic recording media by moving a magnetic recordingtransducer to a position over the media where the data is to be stored.The magnetic recording transducer then generates a magnetic field, whichencodes the data into the magnetic media. Data is read from the media bysimilarly positioning the magnetic read transducer and then sensing themagnetic field of the magnetic media. Read and write operations may beindependently synchronized with the movement of the media to ensure thatthe data can be read from and written to the desired location on themedia.

An important and continuing goal in the data storage industry is that ofincreasing the density of data stored on a medium. For magnetic storagesystems, that goal has lead to increasing the linear density and trackdensity on recording tape or hard disk, and in some cases decreasing thethickness of the magnetic medium. However, the development of smallfootprint, higher performance magnetic storage systems has createdvarious problems in the design of a head assemblies for use in suchsystems.

SUMMARY

A method according to one embodiment includes forming a first portion ofa thin film writer structure on a substantially planar portion of asubstrate such that planes of deposition of the first portion of thewriter structure are substantially parallel to a plane of the substrate;forming a portion of a write gap of the writer structure at an angle ofgreater than 0° relative to the substantially planar portion of thesubstrate; and causing the writer structure to tilt at an angle relativeto the plane of the substrate such that a plane of deposition of thewrite gap is oriented about perpendicular to a final media-facingsurface of the writer structure.

A method according to another embodiment includes forming a firstportion of a thin film writer structure on a substantially planarportion of a substrate such that planes of deposition of the firstportion of the writer structure is substantially parallel to a plane ofthe substrate; forming a sloped portion towards one side of the firstportion of the writer structure, an upper surface of the sloped portionhaving an angle of greater than 0° relative to the substantially planarportion of the substrate; forming a portion of a first pole of thewriter structure on the sloped portion; forming a write gap on theportion of the first pole; forming a portion of a second pole of thewriter structure on the write gap; causing the writer structure to tiltat an angle relative to the plane of the substrate such that a plane ofdeposition of the write gap is about perpendicular to a finalmedia-facing surface of the writer structure; and after causing thewriter structure to tilt, fixing the writer structure in place on thesubstrate at the angle.

Any of these embodiments may be implemented in a magnetic data storagesystem such as a tape drive system, which may include a magnetic head asrecited above, a drive mechanism for passing a magnetic medium (e.g.,recording tape) over the magnetic head, and a controller electricallycoupled to the magnetic head.

Other aspects and embodiments of the present invention will becomeapparent from the following detailed description, which, when taken inconjunction with the drawings, illustrate by way of example theprinciples of the invention.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

FIG. 1 is a schematic diagram of a simplified tape drive systemaccording to one embodiment.

FIG. 2 illustrates a side view of a bi-directional, two-module magnetictape head according to one embodiment.

FIG. 3 is a flowchart of a method according to one embodiment.

FIG. 4 is a flowchart of a method according to one embodiment.

FIGS. 5A-5J are schematic diagrams illustrating steps in the productionof a tilted writer structure according to one embodiment.

FIG. 6 is a schematic diagram of a tilted writer structure according toone embodiment.

FIGS. 7A-7D are schematic diagrams illustrating steps in the productionof a writer structure according to one embodiment.

FIG. 7E is a schematic diagram of a writer structure which may be formedthrough the steps in FIGS. 7A-7D.

FIGS. 8A and 8B are schematic diagrams of a tilted writer structure andreader structure according to one embodiment.

DETAILED DESCRIPTION

The following description is made for the purpose of illustrating thegeneral principles of the present invention and is not meant to limitthe inventive concepts claimed herein. Further, particular featuresdescribed herein can be used in combination with other describedfeatures in each of the various possible combinations and permutations.

Unless otherwise specifically defined herein, all terms are to be giventheir broadest possible interpretation including meanings implied fromthe specification as well as meanings understood by those skilled in theart and/or as defined in dictionaries, treatises, etc.

It must also be noted that, as used in the specification and theappended claims, the singular forms “a,” “an” and “the” include pluralreferents unless otherwise specified.

The following description discloses several preferred embodiments ofmagnetic writers, as well as operation and/or methods of manufacturethereof.

In one general embodiment, a method comprises forming a first portion ofa thin film writer structure on a substantially planar portion of asubstrate such that planes of deposition of the first portion of thewriter structure are substantially parallel to a plane of the substrate;forming a portion of a write gap of the writer structure at an angle ofgreater than 0° relative to the substantially planar portion of thesubstrate; and causing the writer structure to tilt at an angle relativeto the plane of the substrate such that a plane of deposition of thewrite gap is oriented about perpendicular to a final media-facingsurface of the writer structure.

In another general embodiment, a method comprises forming a firstportion of a thin film writer structure on a substantially planarportion of a substrate such that planes of deposition of the firstportion of the writer structure is substantially parallel to a plane ofthe substrate; forming a sloped portion towards one side of the firstportion of the writer structure, an upper surface of the sloped portionhaving an angle of greater than 0° relative to the substantially planarportion of the substrate; forming a portion of a first pole of thewriter structure on the sloped portion; forming a write gap on theportion of the first pole; forming a portion of a second pole of thewriter structure on the write gap; causing the writer structure to tiltat an angle relative to the plane of the substrate such that a plane ofdeposition of the write gap is about perpendicular to a finalmedia-facing surface of the writer structure; and after causing thewriter structure to tilt, fixing the writer structure in place on thesubstrate at the angle.

In another general embodiment, a system comprises a first portioncomprising at least a portion of a coil structure and at least a portionof a magnetic yoke, the first portion being oriented at an angle ofgreater than 0° and less than 90° relative to a substantially planarportion of an underlying substrate; a first pole; a second pole; and awrite gap, a portion of the write gap having a plane of depositionoriented about perpendicular to a final media-facing surface of thewrite gap.

In another general embodiment, a system comprises a first portioncomprising at least a portion of a coil structure, at least a portion ofa magnetic yoke, a first pole, and a write gap, the write gap beingoriented at an angle of greater than 0° and less than 90° relative to asubstantially planar portion of an underlying substrate, wherein thefirst pole has an upper surface oriented about perpendicular to amedia-facing surface of the first pole; and a second pole formed abovethe first pole.

FIG. 1 illustrates a simplified tape drive 100 of a tape-based datastorage system, which may be employed in the context of the presentinvention. While one specific implementation of a tape drive is shown inFIG. 1, it should be noted that the embodiments described herein may beimplemented in the context of any type of magnetic recording system.

As shown, a tape supply cartridge 120 and a take-up reel 121 areprovided to support a tape 122. One or more of the reels may form partof a removable cassette and are not necessarily part of the system 100.The tape drive, such as that illustrated in FIG. 1, may further includedrive motor(s) to drive the tape supply cartridge 120 and the take-upreel 121 to move the tape 122 over a tape head 126 of any type.

Guides 125 guide the tape 122 across the tape head 126. Such tape head126 is in turn coupled to a controller assembly 128 via a cable 130. Thecontroller 128 typically controls head functions such as servofollowing, writing, reading, etc. The cable 130 may include read/writecircuits to transmit data to the head 126 to be recorded on the tape 122and to receive data read by the head 126 from the tape 122. An actuator132 controls position of the head 126 relative to the tape 122.

An interface may also be provided for communication between the tapedrive and a host (integral or external) to send and receive the data andfor controlling the operation of the tape drive and communicating thestatus of the tape drive to the host, all as will be understood by thoseof skill in the art.

By way of example, FIG. 2 illustrates a side view of a bi-directional,two-module magnetic tape head 200 which may be implemented in thecontext of the present invention. As shown, the head includes a pair ofbases 202, each equipped with a module 204, and fixed at a small angle αwith respect to each other. The bases are typically “U-beams” that areadhesively coupled together. Each module 204 includes a substrate 204Aand a closure 204B with readers and/or writers formed thereon. In use, atape 208 is moved over the modules 204 along a media (tape) bearingsurface 209 in the manner shown for reading and writing data on the tape208 using the readers and writers. The wrap angle θ of the tape 208 atedges going onto and exiting the flat media support surfaces 209 areusually between ⅛ degree and 4½ degrees.

The substrates 204A are typically constructed of a wear resistantmaterial, such as AlTiC, a ceramic, etc.

The readers and writers may be arranged in a piggyback configuration.The readers and writers may also be arranged in an interleavedconfiguration. Alternatively, each array of channels may be readers orwriters only. Any of these arrays may contain one or more servo readers.

FIG. 3 illustrates a method according to one embodiment. As an option,the present method 300 may be implemented in the context of thefunctionality and architecture of FIGS. 1-2 and 5-8. Of course, themethod 300 may be carried out in any desired environment. It should benoted that the aforementioned definitions may apply during the presentdescription.

With continued reference to FIG. 3, in operation 302, a first portion ofa thin film writer structure is formed on a substantially planar portionof a substrate such that planes of deposition of the first portion ofthe writer structure is substantially parallel to a plane of thesubstrate. In FIG. 5A, for example, the first portion that is formed ona substrate is the coil 502 and lower yoke 504, along with an insulator506. However, this example does not in any way limit what may be thefirst portion of the writer structure 500 that is formed.

With continued reference to FIG. 3, in operation 304, a portion of awrite gap of the writer structure is formed at an angle of greater than0° relative to the substantially planar portion of the substrate. InFIG. 5C, for example, this portion of at least one pole of the writerstructure is shown as a ramp 510 formed toward the write side 508 of thewriter structure 500. This example in no way limits the design andappearance of this ramp.

In operation 306, the writer structure is caused to tilt at an anglerelative to the plane of the substrate such that a plane of depositionof the write gap is oriented about perpendicular to a final media-facingsurface of the writer structure. Note that the “final media-facingsurface” is meant to mean the surface that faces the media in the finalproduct as sold. For example, the final media-facing surface may be anair bearing surface (ABS), tape bearing surface (TBS), etc. in amagnetic storage device. In many embodiments, the media-facing surfacewill be about parallel to the plane of the substrate. In FIG. 5H, forexample, the writer structure 500 is tilted at an angle θ relative tothe planar surface of the substrate. This example is not limiting as tothe angle and direction in which the writer structure 500 may be tilted.

In optional operation 308, after causing the writer structure to tilt,the writer structure may be fixed in place on the substrate at theangle. In FIG. 5I, for example, the writer structure 500 may be fixed inplace with a material 522, which is then planarized as shown in FIG. 5J.This example is not limiting as to the type of material that is used tofix the writer structure 500 in place. In some approaches, operation 308may be omitted.

In further approaches, the writer structure may be self-fixing, e.g., bya pre-applied adhesion layer, by naturally-occurring attractive forceswith an underlying layer, etc.

In yet other approaches, a protective layer may be added to the writerstructure, which may have the effect of fixing the writer structure inplace.

In one embodiment, the substrate comprises silicon.

In another embodiment, the writer structure may be planarized along aplane substantially parallel to the plane of the substrate.

In yet another embodiment, the writer structure may be formed on a rigidplatform that tilts with the writer structure.

In a further embodiment, an axis of the tilting is about parallel to theplane of the substrate.

Yet another approach includes portions of two poles that may be formedat an angle of greater than 0° relative to the substantially planarportion of the substrate.

Another embodiment further comprises forming a magnetic sensor, whereinthe sensor and the writer structure tilt together, as shown in FIGS. 8Aand 8B.

Yet another embodiment further comprises removing a sacrificial portionof the substrate for creating a pivot point about which the writerstructure may pivot, allowing the writer structure to be tilted relativeto the plane of the substrate. Another embodiment which uses a pivotpoint may include the pivot point under and off-center from the writerstructure.

A further embodiment which includes a pivot point wherein removing aportion of the substrate allows built-in stresses to cause the writerstructure to tilt at the desired angle.

Yet another approach which includes a pivot point may have the pivotpoint spaced apart from the writer structure such that the writerstructure pivots along an arc. Also, another approach may use capillaryaction operatively to cause the writer structure to tilt at the desiredangle. Another embodiment may include removing a sacrificial portion ofthe substrate to cause another portion of the substrate to form acantilever supporting the writer structure, wherein a local stressoperatively causes the cantilever to bend, thereby causing the writerstructure to tilt at the desired angle.

FIG. 4 illustrates a method according to one embodiment. As an option,the present method 400 may be implemented in the context of thefunctionality and architecture of FIGS. 1-2 and 5-8. Of course, themethod 400 may be carried out in any desired environment. It should benoted that the aforementioned definitions may apply during the presentdescription.

With continued reference to FIG. 4, in operation 402, a first portion ofa thin film writer structure is formed on a substantially planar portionof a substrate such that planes of deposition of the first portion ofthe writer structure is substantially parallel to a plane of thesubstrate.

In operation 404, a sloped portion is formed towards one side of thefirst portion of the writer structure, an upper surface of the slopedportion having an angle of greater than 0° relative to the substantiallyplanar portion of the substrate.

In operation 406, a portion of a first pole of the writer structure isformed on the sloped portion.

In operation 408, a write gap is formed on the portion of the firstpole.

In operation 410, a portion of a second pole of the writer structure isformed on the write gap.

In operation 412, the writer structure is caused to tilt at an anglerelative to the plane of the substrate such that a plane of depositionof the write gap is about perpendicular to a media-facing surface of thewriter structure.

In operation 414, after causing the writer structure to tilt, the writerstructure is fixed in place on the substrate at the angle.

In another embodiment, the writer structure may be planarized along aplane substantially parallel to the plane of the substrate. Illustrativeplanarization techniques include chemical-mechanical polishing (CMP),grinding, etc.

Another embodiment further comprises forming a magnetic sensor, whereinthe sensor and the writer structure tilt together, as shown in FIGS. 8Aand 8B.

FIGS. 5A-J show how a head is fabricated according to one embodiment.FIG. 5A, a step in a process to produce a tilted writer structure 500 isshown according to one embodiment. In this figure, a coil 502 is formedon a substrate along with the lower yoke 504. Layered on top of the coilstructure is an insulator layer 506, which can be comprised of anymaterial which can effectively insulate the coil from the other magneticcomponents of the writer structure. Side yokes 507 may also be present.

In FIG. 5B, a subsequent step in a process to produce a tilted writerstructure 500 is shown according to one embodiment. In this figure, theexisting structure is planarized (as indicated by the dashed line) toproduce a smooth planar surface for continued processing of the writerstructure 500. Any planarizing technique known in the art which canproduce a smooth, planar surface may be used.

In FIG. 5C, a subsequent step in a process to produce a tilted writerstructure 500 is shown according to one embodiment. In this figure, aramp 510 is formed on the side (as indicated by arrow 508) of the writerstructure 500. This ramp 510 may be made of any suitable materialincluding insulating or magnetic materials. The ramp 510 will be used inthe next few processing steps to further produce the tilted writerstructure 500.

In FIG. 5D, a subsequent step in a process to produce a tilted writerstructure 500 is shown according to one embodiment. In this figure, afirst pole (P1) 512 is formed on the ramp 510 and on the back side ofthe writer structure 500.

In FIG. 5E, a subsequent step in a process to produce a tilted writerstructure 500 is shown according to one embodiment. In this figure,another insulator layer 514 is added to the existing insulator layer506.

In FIG. 5F, a subsequent step in a process to produce a tilted writerstructure 500 is shown according to one embodiment. In this figure, awrite gap 516 is formed on top of the first pole 512 and insulator layer514. This next insulator layer 514 may be of the same material as thefirst insulator layer 506, or may be of a differing material selectedfor its insulative properties.

In FIG. 5G, a subsequent step in a process to produce a tilted writerstructure 500 is shown according to one embodiment. In this figure, asecond pole (P2) 518 is formed on the write gap 516. A fill layer 519may be added over the second pole.

In FIG. 5H, a subsequent step in a process to produce a tilted writerstructure 500 is shown according to one embodiment. In this exemplaryfigure, the writer structure 500 is tilted at an angle θ relative to theplanar surface of the substrate. In some approaches, the writerstructure 500 may be tilted by pivoting a supporting layer 521 about apivot point. The pivot point may be positioned at a point along thelength of layer 521. Other methods of tilting may also be employed, asdescribed elsewhere herein.

For simplicity, the optional fill layer 519 and supporting layer 521 arenot shown in the following figures. In FIG. 5I, a subsequent andoptional step in a process to produce a tilted writer structure 500 isshown according to one embodiment. In this figure, a material 522 isformed around the writer structure 500. This material may be used to fixor protect the writer structure. The material is capable of holding thewriter structure in place or protecting it, and does not interfere withthe operation of the writer structure 500.

In FIG. 5J, a subsequent step in a process to produce a tilted writerstructure 500 is shown according to one embodiment. In this figure, thewriter structure 500 and fixing material 522 is planarized (as indicatedby the dashed line) to form the recording surface. Further processingmay occur, or the writer structure 500 may be ready for writingoperations.

FIG. 6 is a schematic diagram illustrating a tilted writer structure 600according to one embodiment. Included in the diagram for illustrativepurposes are the lines of flux 602 that may be produced from the writerstructure 600 once it has been tilted relative to the planar surface ofthe media-facing surface 604.

With continued reference to FIG. 6, the writer structure 600 iscomprised of a first portion 606 comprising at least a portion of a coilstructure 608, at least a portion of a magnetic yoke, and a first pole610, the first portion 606 being oriented at an angle of greater than 0°and less than 90° relative to a substantially planar portion of anunderlying substrate, wherein the first pole 610 has an upper surfaceoriented about perpendicular to a media-facing surface of the first pole610; and a second pole 612 formed above the first pole 610, a portion ofthe second pole 612 having a plane of deposition oriented aboutperpendicular to a media-facing surface of the second pole 612. A writegap 614 is positioned between the poles 610, 612, a portion of the writegap having a plane of deposition oriented about perpendicular to a finalmedia-facing surface 604 of the write gap. For example, the finalmedia-facing surface may be an air bearing surface (ABS), tape bearingsurface (TBS), etc. In many embodiments, the media-facing surface willbe about parallel to the plane of the substrate.

In one particularly preferred embodiment, the portion of the writerstructure 600 which is in contact with the media surface 604 isperpendicular to the media surface 604. This arrangement creates ahighly symmetric magnetic field when a writing operation is performed.

In another embodiment, the writer structure 600 is further comprised ofa sloped portion under the first pole 610, the sloped portion having anupper surface oriented about perpendicular to a media-facing surface ofthe at least one pole. Such a sloped portion may be similar to the rampdescribed with reference to FIG. 5C.

FIG. 7A is a schematic diagram of a first step in the production of awriter structure 700 according to another embodiment. Here, a bottompole (first pole) 702 is deposited on a substrate. An insulator layer704 is then formed on the first pole 702, along with at least a portionof a coil structure 706. In this embodiment, a flat, or pancake type,coil is used for illustrative purposes, but any coil type may be used.

FIG. 7B is a schematic diagram of a subsequent step in the production ofa writer structure 700 according to one embodiment. In this diagram, apole material 708 is deposited on the structures already laid down onthe substrate. This pole material 708 is optionally planarized, and thena ramp mask 710 is deposited on a portion of the pole material 708.

FIG. 7C is a schematic diagram of a subsequent step in the production ofa writer structure 700 according to one embodiment. In this diagram,etching, e.g., isotropic etching, is used to form the ramp 712 whichbecomes a portion of the first pole 702. Also a portion of the polematerial 714 may be formed in this step and will become a portion of theback gap in a subsequent step.

FIG. 7D is a schematic diagram of a subsequent step in the production ofa writer structure 700 according to one embodiment. In this diagram, awrite gap 716 is formed above the top of the ramp and coil structure.Then, a pole material is formed above the write gap 716 and connectingto the back gap 718 portion of the first pole 702. This pole materialforms the top pole (second pole) 720. This writer structure can then betilted at an angle of between about 0° and less than 90°.

FIG. 7E shows a schematic diagram of a writer structure 700 which canresult from the production steps illustrated in FIGS. 7A-7D, or throughsome other production method. Here, after tilting, a writer structure700 includes a first portion comprising at least a portion of a coilstructure 706, at least a portion of a magnetic yoke, a first pole 702,and a write gap 716, the portion of the write gap nearest themedia-facing surface 722 being oriented at an angle of greater than 0°and less than 90° relative to a substantially planar portion of anunderlying substrate, wherein the first pole 702 has an upper surfaceoriented about perpendicular to a media-facing surface 722 of the first.Also included is a second pole 720 formed above the first pole 702, aportion of the second pole 720 optionally having a plane of depositionoriented about perpendicular to a media-facing surface 722 of the secondpole 720.

Now referring to FIG. 8A, another embodiment includes a writer structure802 and a reader structure 804. In this embodiment, a reader structure804 may be manufactured on the same wafer surface as a writer structure802, here appearing below the writer structure 802. The reader structuremay be used as a servo-reader or data-reader. These structures may thenbe tilted at an angle θ such that they can be planarized together at amedia surface 806.

Illustrative methods for tilting structures, including at least some ofthose disclosed herein, are described in U.S. patent application Ser.No. ______ to Biskeborn et al., having title “Methods for FabricatingMagnetic Transducers Using Post-Deposition Tilting,” filed concurrentlyherewith, and which is herein incorporated by reference.

While various embodiments have been described above, it should beunderstood that they have been presented by way of example only, and notlimitation. Thus, the breadth and scope of a preferred embodiment shouldnot be limited by any of the above-described exemplary embodiments, butshould be defined only in accordance with the following claims and theirequivalents.

1. A method, comprising: forming a first portion of a thin film writerstructure on a substantially planar portion of a substrate such thatplanes of deposition of the first portion of the writer structure aresubstantially parallel to a plane of the substrate; forming a portion ofa write gap of the writer structure at an angle of greater than 0°relative to the substantially planar portion of the substrate; andcausing the writer structure to tilt at an angle relative to the planeof the substrate such that a plane of deposition of the write gap isoriented about perpendicular to a final media-facing surface of thewriter structure.
 2. A method as recited in claim 1, wherein thesubstrate comprises silicon.
 3. A method as recited in claim 1, furthercomprising planarizing the writer structure along a plane substantiallyparallel to the plane of the substrate.
 4. A method as recited in claim1, wherein the writer structure is formed on a rigid platform that tiltswith the writer structure.
 5. A method as recited in claim 1, wherein anaxis of the tilting is about parallel to the plane of the substrate. 6.A method as recited in claim 1, further comprising forming a magneticsensor, wherein the sensor and the writer structure tilt together.
 7. Amethod as recited in claim 1, further comprising removing a sacrificialportion of the substrate for creating a pivot point about which thewriter structure pivots.
 8. A method as recited in claim 7, wherein thepivot point is under and off-center from the writer structure.
 9. Amethod as recited in claim 7, wherein the pivot point is spaced apartfrom the writer structure such that the writer structure pivots along anarc.
 10. A method as recited in claim 9, wherein capillary actionoperatively causes the writer structure to tilt at the angle.
 11. Amethod as recited in claim 9, wherein removing the sacrificial portionof the substrate causes another portion of the substrate to form acantilever supporting the writer structure, wherein a local stressoperatively causes the cantilever to bend, thereby causing the writerstructure to tilt at the angle.
 12. A method as recited in claim 7,wherein removing the portion of the substrate allows built-in stressesto cause the writer structure to tilt at the angle.
 13. A method asrecited in claim 1, wherein portions of two poles are formed at an angleof greater than 0° relative to the substantially planar portion of thesubstrate.
 14. A method as recited in claim 1, and further comprisingafter causing the writer structure to tilt, fixing the writer structurein place on the substrate at the angle.
 15. A method, comprising:forming a first portion of a thin film writer structure on asubstantially planar portion of a substrate such that planes ofdeposition of the first portion of the writer structure is substantiallyparallel to a plane of the substrate; forming a sloped portion towardsone side of the first portion of the writer structure, an upper surfaceof the sloped portion having an angle of greater than 0° relative to thesubstantially planar portion of the substrate; forming a portion of afirst pole of the writer structure on the sloped portion; forming awrite gap on the portion of the first pole; forming a portion of asecond pole of the writer structure on the write gap; and causing thewriter structure to tilt at an angle relative to the plane of thesubstrate such that a plane of deposition of the write gap is aboutperpendicular to a final media-facing surface of the writer structure;and after causing the writer structure to tilt, fixing the writerstructure in place on the substrate at the angle.
 16. A method asrecited in claim 15, further comprising planarizing the writer structurealong a plane substantially parallel to the plane of the substrate. 17.A method as recited in claim 15, further comprising forming a magneticsensor, wherein the sensor and the writer structure tilt together.